Authors: |
I. Bányász, S. Pelli, G. Nunzi-Conti, G. C. Righini, S. Berneschi, E. Szilágyi, A. Németh, M. Fried, P. Petrik, E. Agócs, B. Kalas, Z. Zolnai, N. Q. Khanh, I. Rajta, G. U. L. Nagy, V. Havranek, V. Vosecek, M. Veres and L. Himics |
Abstract: |
Various methods, based on the use of ion beams, were used for the fabrication of planar and channel optical waveguides and Bragg gratings in optical crystals and glasses. Some examples of the results of these researches are presented in this review. Researches were initiated on ion beam fabrication of planar and channel optical waveguides in tellurite glasses. The ions used in the experiments were mainly helium, carbon, nitrogen and oxygen. In case of the two dimensional elements, like channel waveguides, both masked ion implantation and direct writing with ion microbeam were used. Optical microscopy (phase contrast, interference and interference contrast (INTERPHAKO), spectroscopic ellipsometry, m-line spectroscopy, Rutherford Backscattering and micro Raman spectroscopy were used to test the integrated optical elements. |